Fast Simulation of Electro-Thermal MEMS

Fast Simulation of Electro-Thermal MEMS

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This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices.


Title:Fast Simulation of Electro-Thermal MEMS
Author: Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink
Publisher:Springer Science & Business Media - 2006-11-01
ISBN-13:

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